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memsstar
Starlaw Park, Starlaw Road
Livingston, EH54 85F UK
phone: +44-15-0640-9160
fax: +44-15-0646-4300
email:
www.memsstar.com
Booth 11
memsstar is a leading supplier of vapour phase processing equipment for the MEMS industry. memsstar specialises in the isotropic etching of Si, SiO2 and organic layers. memsstar also offers surface modification processes by application of self assembled monolayers. All memsstar modules are available from lab to fully automated production systems.
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