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Abstract Classification List
The category of Design, Simulation and Theoretical Concepts will not appear on the abstract topic list for the MEMS 2011 Conference as the remaining categories will encompass this topic.
- Fabrication Technologies
Deposition; growth; top down structuring (MEMS specific advances in lithography, etching, high aspect ratio technologies); bottom up structuring (nano imprinting, self-assembly, structured growth); surface modification; micro assembly; 3-D fabrication; process integration.
- Packaging Technologies
Zero-level and/or wafer level packaging; wafer level functional testing. wafer bonding, bonding and interconnects.
- Materials and Device Characterization
Novel functional materials; MEMS materials under new operating conditions; measurement of material properties; calibration and compensation; failure analysis; degradation mechanisms and drift; reliability.
- Mechanical Sensors and Systems
Sensors and systems for inertial forces (accelerometers, gyroscopes, shock sensors), pressure, force, stress; resonant sensors and systems; acoustic sensors and systems (including MEMS ultrasound systems).
- Physical MEMS (Optical, Magneto)
Sensors and systems for electromagnetic quantities; optical sensors, MEMS based photonic systems, integrated optics (lenses); micro mirrors and MEMS displays.
- RF MEMS
MEMS oscillators, filters (including BAWs, FBARs); switches; phase shifters; inductors and varactors; RF MEMS based systems (including integration of passives); wave-guides, antennas, MEMS micro wave components.
- Bio and Chemical Micro Sensors and Systems
Micro-total-analysis systems; micro-PCR systems; chemical and biochemical sensors and systems; MEMS based gas sensors.
- Medical Microsystems
Implantable devices; drug delivery; micro device/system for clinical use.
- Micro-Fluidic Components and Systems
Pumps, valves, mixers, and separators; microchannel gas and liquid flows; two-phase flows; suspension flows, droplet and bubble dynamics; thermal devices and systems (including thermal flow sensors); electrokinetic flow/dielectrophoresis/electrowetting.
- Micro-Actuators
Springs and grippers; motors; beam and membrane actuators; MEMS-based robotics.
- Energy Harvesting and Power MEMS
Micro energy conversion systems (micro fuel cell, bio fuel cell, micro engines); energy harvesting device (micro thermoelectric devices, vibration-driven generators); micro batteries; micro cooling systems; micro thrusters.
- Nano-Electro-Mechanical Devices and Systems
Nanotubes and nanowires; self-organized nano structures; molecular machinery, nanoactuators, nanorobots; nanoelectronic devices with sensing applications; nanostructure integration, interfaces and packaging.
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